Abstract: Materials containing copper were dissolved with mixed acids of hydrochloric acid, nitric acid, hydrofluoric acid, perchloric acid and sulfuric acid, and the 16 kinds of rare earth elements in the samples were determined by ICP-MS. The matrix effect was elimited by using 103Rh as internal standard. The linearity ranges of 16 kinds of rare earth elements were within 100 μg·L-1, with detection limits (3s) in the range of 0.06-0.25 μg·L-1. Recovery rates obtained by standard addition method were in the range of 91.0%-110% and RSDs (n=11) were less than 3.0%.