Abstract: ICP-MS was applied to the determination of 10 elements i.e. Ge, As, Y, Ru, In, Te, Hf, Pt, Au and Hg in nickel base superalloy. The sample was digested with a mixture of hydrochloric acid and nitric acid. Hydrogen peroxide was added after digestion in order to avoid precipitation of tungstic acid. In testing, methods of matrix matching and on-line internal standard were applied to compensate the signal disturbance caused by matrix effect and sampling rate. The mass spectrum interference was eliminated by choosing proper isotope, using correction equation and applying kinetic energy bias mode. Detection limits (3s) of the 10 elements found were in the range of 0.002-0.65 μg·g-1. The proposed method was used in the analysis of 3 standard samples (GBW 01636, GBW 01638 and GBW 01640), giving results in consistency with the certified value with RSD′s (n=10) in the range of 0.60%-45%.