Abstract: The 27.12 MHz self-excited all-solid-state RF source was selected as the research object,and the matching characteristics of RF source in the different of organic solvent matrix (ethanol, xylene and kerosene) were investigated. The signal intensity and short-term stability of Al, Ba, Ce, Cu, La, Pb, Tm, Y and Zn in these matrix were determined by ICP-MS with this RF source. As shown by the results, the method could achieve direct injection of ethanol, 50% (φ) xylene solution and 20% (φ) kerosene solution as solvent, indicating that the RF source matched well in the above organic solvent media and can stabilize the plasma without quenching.