Abstract: Mass spectrometric conditions, matrix interference, mass spectrometric interference and isotope selection of 36 trace elements in nickel-based single crystal superalloy were studied by mass spectrometric interference elimination technique based on high-resolution inductively coupled plasma mass spectrometry (HR-ICP-MS). 0.1000 g of the sample was taken, and then dissolved in 10 mL of the mixed acid of hydrochloric acid and nitric acid at a volume ratio of 3∶1 and 1 mL of hydrofluoric acid. The volume of the solution was made up to 250 mL with water. The isotopes and resolution modes of the analysis elements were determined by the calculation and determination of the mass spectrometric interference in complex matrix, and the interference elimination of co-existing elements, and 36 trace elements in nickel-based single crystal superalloy had been accurately determined. Quantitative analysis was made by standard addition method, with detection limits (3s) of 36 trace elements in the range of 0.004-6.000 μg·L^-1. This method was applied to analysis of international reference materials, and the determined values obtained by this method were basically consistent with the certified values. This method has been applied to analysis of nickel-based single crystal superalloy samples, and the detection amounts were found in the range of 0.000 001 0%-0.018%.