Abstract: The presence of anions in wet electronic chemicals can introduce contamination into electronic components, resulting in issues such as short circuits,deposition,defects,and corrosion. Therefore,the precise determination of anions is of utmost importance. Ion chromatography emerges as an ideal method for quality testing of wet electronic chemicals,owing to its high detection sensitivity and accurate results. Common wet electronic chemicals and their application fields as well as the structure of ion chromatograph were briefly introduced. Commonly used sample preparation (online pre-concentration and online valve changeover) techniques for detection of anions in wet electronic chemicals by ion chromatography and the application in the detection of various wet electronic chemicals (including electronic grade water,ultra-clean and high-purity acids/bases,organic solvents,and photoresist) were reviewed. Furthermore,a comprehensive overview of the anticipated applications of ion chromatography was evaluated,including current challenges and future development (66 ref. cited).