Abstract: Isotope dilution-inductively coupled plasma mass spectrometry （ID-ICP-MS） was a highly sensitive analytical technique. In recent years, it had been widely applied to the analysis of trace elements and isotopes in fields including geology, environment, biology and materials. Therefore, a brief overview of the basic principle of ID-ICP-MS was presented, the key factors that affected the precision and accuracy of measurements were thoroughly explored, and the corresponding correction methods were proposed. In particular, the research progress of ID-ICP-MS and its hyphenated techniques over the past decade were comprehensively reviewed. The future development prospects of this technology in the field of high-throughput and multi-element analysis were anticipated. The purpose of this work was to provide valuable references for improving the performance of ID-ICP-MS in the analysis of complex samples （77 ref. cited）.