Abstract: The food sample was treated by microwave assisted digestion with a mixed solution of HNO3 and H2O2, and the content of cadmium in the sample solution was determined by ICP-MS. The MS interference was eliminated by collision/reaction cell technique. Linear relationship between values of emission intensity and mass concentration of cadmium was kept in the range within 40 μg·L-1, with detection limit (3s) of 0.05 μg·kg-1. The proposed method was used in the analysis of 3 CRM′s, including wheat (GBW 08503), rice (GBW 10010) and tea (GBW 10016); the results obtained were in conformity with certified values.