Abstract: A method of GC for the determination of purity of silicon tetrachloride was proposed. Sample was separated on LD-SE-54 quartz capillary column (0.53 mm×30 m, 1.2 μm)and determined with thermo-conductivity detector (TCD). The quantification was carried out by the method of normalization. The proposed method was used in the analysis of a standard sample of silicon tetrachloride, the relative error between the result obtained and the certified value was found to be 0.18%, and values of RSD (n=5) found was 0.12%.