GC Analysis for Impurity Gases in Tungsten Hexa-fluoride of Super-purity

A method of GC with discharge ionization detector (DID) for the determination of impurity gases in tungsten hexa-fluoride (WF6) of super-purity was proposed and the installation of binary-channel analytic system for back-blowing was designed. When the impurity gases in WF6 enter into the detector,the matrix WF6 was blown out in time in order to prevent the instrument from corrosion by WF6. By using the orthogonal experimental designing,the optimized working conditions of the GC instrument were selected. The optimum time of back-blowing for using different columns were also studied. Under the optimum conditions,the contents of CF4,CO2,SF6,O2,N2 and CO in WF6 were determined.