ICP-MS Determination of Trace Elements in High-Purity Silicon Nitride Powder

The sample of high-purity silicon nitride powder was treated with HF and HNO3 by microwave assisted digestion, and the contents of 18 trace elements in the sample solution were determined by ICP-MS. The interferences were eliminated by using suitable isotopes and applying correction formula. The values of detection limits (3s) of the found were in the range of 5.2-20.8 pg·g-1. The proposed method was applied to the analysis of sample trace elements of high-purity silicon nitride powder, giving values of recovery by standard addition method in the range of 89.20%-105.2%, and RSD′s (n=6) less than 10%.